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The integration and test phases that are part of thedevelopment and manufacturing of complexmanufacturing systems are costly and time consuming.As time-to-market is becoming increasingly important,it is crucial to keep these phases as short aspossible, while maintaining system quality. This isespecially true for the time-to-market drivensemiconductor industry and for companies providingmanufacturing systems to this industry such as ASML,a provider of lithographic systems. This bookdescribes three methods that can be used to reducecost and time during these integration and testphases. These methods are: 1) a method to constructan optimal test plan with respect to time, costand/or quality, 2) a method to construct an optimalintegration plan with respect to time, cost and/orquality, and 3) a method to construct an optimalintegration and test plan with respect to time, costand/or quality. Furthermore, this book shows thatoptimal integration and test plans are often moreefficient than manually created plans, which reducesthe time-to-market of a complex system whilemaintaining the same final system quality.